Spin Coater NTCR (12”)
Engineered for FS 209 Class 100 (ISO Class 5) clean rooms with 100% Natural Polypropylene working chamber and chassis for zero metal contamination and ultra-low particle generation. Available in 8″ and 12″ (50 – 12,000 RPM) with ±1% RPM accuracy with multiple dispensing head options. Intuitive touchscreen UI with wireless mobile functionality offers real-time monitoring and unlimited recipe storage. Seamless, tool-less PP housing allows rapid wipe-down and resists aggressive solvents. Optional vacuum/vacuum-free chucks, Centering Tool, Liners, UV Curing, Infra-Red Heating, Wastage Collecting Containers and PC Software. Suitable for applications like Semiconductor lithography, MEMS & microsystems fabrication, OLED and display panel manufacturing, Optical coatings & sol-gel films.
Features:
Material & Chamber Construction
- 100% Polypropylene Construction
- Fully non-metallic wetted path and chassis for zero metal contamination and ultra-low particle generation—ideal for FS 209 Class 100 (ISO Class 5) clean rooms
- Chemical-resistant all-polypropylene chassis
- Ø 12 ” Natural Polypropylene working chamber
- Multiple dispensing ports (edge-bead ready)
- Seamless polypropylene homopolymer molding—no joints, no dead zones, no leak paths
Substrate Handling & Processing Capability
- Large-Format Processing
- Accommodates up to 250 mm substrates, plus multiple smaller dies in one run to maximize throughput in R&D and pilot production.
Chemical Resistance & Material Compatibility
- Wide Chemical Compatibility
- 1 M HCl & NaOH Resistant — Impervious to strong acids and alkalis
- Solvent-Proof Construction — Compatible with acetone, toluene, isopropanol, and more
- Natural Polypropylene construction resists aggressive developers, strippers, acids, bases, and organic solvents without risk of leaching or corrosion—perfect for advanced resist, dielectric, and hybrid-material formulations.
Performance & Control
- Precision Spin Control
- 50 – 12,000 RPM with ±1% RPM accuracy, programmable acceleration/deceleration, and ±1% thickness uniformity across the entire substrate.
Cleanroom & Glovebox Compatibility
- Clean-Room-Grade Design
- Seamless, rounded interior surfaces for rapid wipe-down; tool-less, snap-fit covers; sealed electronics bay; and no metal fasteners in the processing chamber.
- Fits through Antechamber of glovebox*
- Remote operation from outside glovebox to ensure a comfortable operation for the user
- User Interface Tab can be fitted onto the Glove-Box wall (On request)
User Interface & Process Management
- Integrated Recipe Management
- Integrated vacuum control and USB data-logging for process validation.
- Android™ touch UI, 10 steps per program
- Store up virtually unlimited recipes
- Live Graphical representation of RPM vs Time
Specifications:
| Feature | Detail | ||
|---|---|---|---|
| NTCR-12 | |||
| Speed | 50 – 12000 RPM | ||
| Acceleration | 1 – 8000 RPM/s | ||
| Drive system | BLDC motor | ||
| Standard chucks | 1 Vacuum Chuck (10mm * 10mm to 2” dia. Substrate) | ||
| 1 Universal Vacuum Chuck (20 mm * 20 mm to 4″ dia. Substrates) | |||
| 1 Universal Vacuum-Less Chuck (25 mm * 25 mm, 25 mm * 75 mm and 2”, 3” & 4” diameter substrates) | |||
| Drainpipe | Polypropylene Pipe at the side of chamber | ||
| Housing material | Natural Polypropylene | ||
| Time per program | 10000 | ||
| User interface | Semi Integrated Android Based Touch Display | ||
| Live rpm | Yes | ||
| Live program time | Yes | ||
| Program steps | 10 steps per program (100 Steps Customizable) | ||
| Storage capacity | Unlimited Programs | ||
| Substrate holding mechanism | Vacuum, vacuum-less & hybrid | ||
| Optional purchase | Customized Chuck (Vacuum or Vacuum-Less) to hold substrates from 5 to 250 mm dia. | ||
| Substrate size | 5 to 250 mm diameter | ||
| Working chamber material | Solid Natural Polypropylene | ||
| Working chamber size | 12” Diameter; 4” Height | ||
| Substrate holding vacuum | 650 mmHg Maximum | ||
| Vacuum connections | 10mm PU hose – 2m length – default | ||
| Integrated Vacumm Switch (ON/OFF) | Yes | ||
| Spirit level | External | ||
| Safety feature | Lid Interlock safety for open cover | ||
| Liquid dispensing | Centre Hole in the Lid for liquid dispensing | ||
| Lid Material | Translucent brown acrylic lid (compatible for photo-resist coating) | ||
| Nitrogen Purging | Pneumatic connection in the lid for Nitrogen Purging | ||
| Dimensions (L x B x H) | 375 x 375 x 360 mm (Without Drain & Display) | ||
| Power Requirement | 220V AC/50Hz; DC Adapter will be provided | ||
| Warranty | 12 months warranty with 3 years of support | ||
| Installation Support | Reference Videos (Unpacking + Installation + Working Videos) and Online Support. | ||
| Add-Ons & Accessories | Oil-Free Vacuum Pump | ||
| Auto Dispenser with Micro Syringe (250 µl) | |||
| UV Lid (365nm) | |||
| Polypropylene Liners | |||
| IR Heating (RT – 200°C) | |||
| PC Connectivity Software (compatible only for Windows OS) | |||
| Vacuum Generator | |||
| Polypropylene Wastage Collecting Container (300 mL, 500mL & 1L) | |||
| Edge Beading (Top only) | |||
| Multiple Dispensing Ports | |||